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Argon Gas Purifier

Original Gas Demand :
Purity ≥ 99.9%
Impurity Content O2<1000 ppm;H2O<1000 ppm
Output Gas Purity :
Purity ≥ 99.999%
Impurity content O2≤0.5 PPm;H2O≤1 ppm(Dew point≤-76℃); CO+CO2≤0.1 ppm, S,P Oxides≤0.1ppm; Number of dust particles(≥0.3 μm)3-5s/ L
Operating Pressure : ≤0.8 MPa
Max Flow Rate : ≤60 L/min